Tokyo Electron XPC-T0090A-11接口板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
產(chǎn)品名稱： TEL Tokyo Electron XPC-T0090A-11 接口板
產(chǎn)品類型： 信號(hào)接口模塊 / 控制板卡
一、產(chǎn)品應(yīng)用領(lǐng)域
半導(dǎo)體設(shè)備控制系統(tǒng)
用于蝕刻、CVD、PVD、清洗等設(shè)備中，實(shí)現(xiàn)主控系統(tǒng)與傳感器、執(zhí)行器的信號(hào)接口功能。晶圓處理與傳輸模塊
應(yīng)用于晶圓搬運(yùn)單元（如Load Port、機(jī)器人臂），用于信號(hào)傳輸與狀態(tài)反饋。自動(dòng)化設(shè)備的輸入/輸出接口
連接多路數(shù)字或模擬I/O信號(hào)，用于系統(tǒng)狀態(tài)檢測(cè)和控制指令輸出。真空系統(tǒng)與工藝環(huán)境控制
在設(shè)備真空腔體或氣體系統(tǒng)控制中用于監(jiān)控與調(diào)節(jié)信號(hào)交互。多模塊間通信橋接
支持不同模塊或子系統(tǒng)之間的總線通信、數(shù)據(jù)同步，確保整體協(xié)調(diào)運(yùn)行。
英文資料：
Product Name: TEL Tokyo Electron XPC-T0090A-11 Interface Board
Product Type: Signal Interface Module/Control Board
1、 Product application areas
Semiconductor equipment control system
Used for etching CVD、PVD、 Implement signal interface functions between the main control system, sensors, and actuators in cleaning and other equipment.
Wafer Processing and Transport Module
Applied to wafer handling units (such as load ports, robot arms) for signal transmission and status feedback.
Input/output interface of automation equipment
Connect multiple digital or analog I/O signals for system status detection and control instruction output.
Vacuum System and Process Environment Control
Used for monitoring and regulating signal interaction in equipment vacuum chambers or gas system control.
Multi module communication bridging
Support bus communication and data synchronization between different modules or subsystems to ensure overall coordinated operation.
2.產(chǎn) 品 展 示
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| PMA43P-10100-00 | AMAT 0100-09131 | PFTL101B-2.0KN 3BSE004185R1 2.0KN |
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